摘要
阻抗匹配是微波系统的必要环节。传统的手工匹配方式限制了微波系统在很多领域的应用。针对微波等离子体设备,基于ARM CortexM3的LM3S8962处理器,可构建一种微波自动阻抗匹配系统。系统硬件包括信号检测、电机驱动等电路,软件方面进行嵌入式应用开发、自动阻抗匹配算法研究和编程等。测试结果表明,该系统实现首次自动阻抗匹配的时间低于1 min,跟踪负载动态变化再次实现匹配的时间低于10 s,匹配时反射与入射功率之比低于10%。该系统有利于促进微波技术的应用。
Impedance matching is a necessary part of the microwave system. The traditional manual method limits applications of microwave systems in many fields. A microwave automatic impedance matching matching system based on LM3S8962 processor is presented for the microwave plasma device. The system hardware in- cludes circuits of signal detection, motor driver, etc. Studying and programming of automatic tuning algorithm are completed for the system software, as well as embedded application development. Test results show that the system can complete initial automatic matching within 1 minute, and achieve another matching within 10 sec- onds when tracking dynamic load changes. The reflected-to-incident power ratio is less than 10% after matc- hing. The system plays an important role in promoting the application of microwave technology.
出处
《测控技术》
CSCD
2015年第3期113-115,119,共4页
Measurement & Control Technology
基金
2012年度国家级大学生创新创业训练计划项目(201210358125)
