LTCC生瓷带流延工艺研究

Research on LTCC Tape Casting Process

通过合理调配材料成分,有效充分地球磨混料,精确控制工艺参数,成功流延加工出一种硼硅酸盐玻璃/氧化铝陶瓷复合材料体系的低温共烧陶瓷(LTCC)生瓷带。通过对LTCC生瓷带进行热解质量(TG)分析,确定了LTCC基板的烧结温度曲线,对比测试了试制LTCC生瓷带与DuPont 951PT生瓷带及其烧成LTCC基板的性能,考核了试制生瓷带的LTCC加工工艺适应性。结果表明,试制LTCC生瓷带与951PT生瓷带相比,外观质量、厚度、未烧与烧成体密度及烧成LTCC基板的热学性能基本相当,介电常数和介电损耗略有差异,机械强度略大,工艺适应性满足LTCC基板加工实用要求。

A borosilicate glass/alumina composite LTCC tape was casted successfully by proper material ingredient blending, effective and thorough ball mixing, as well as accurate process parameter controlling, the LTCC substrate co-fir- ing temperature curve was determined by TGA （thermo-gravimetric analysis）, the properties of our developed tape and Du- Pont 951PT tape and their co-fired LTCC substrates were tested by contrast, the LTCC manufacturing adaptability of the developed tape was checked. The results showed that the developed tape and 951PT tape had well-matched outward quality, thickness, green and fired bulk density and fired LTCC substrate thermal properties, but their dielectric constants and die- lectric losses were a bit different, and the developed tape was a little stronger mechanically,its LTCC manufacturing adapta- bility had met the requirements of actual application quite well.