微纳结构几何特征检测技术的研究现状与发展趋势

Research Status and Tendency of Measurement Techniques for Geometric Features of Micro/Nano Structures

微纳结构的几何特征对微纳结构功能器件的性能有着至关重要的影响,研究如何对微纳结构的几何特征进行高效超精密检测是发展微纳结构功能器件的必然要求.评述了现有的检测技术原理及应用,主要涉及:X射线显微成像术、扫描透射电子断层扫描成像技术、电子显微镜、扫描探针显微镜和激光共聚焦断层扫描显微镜等,分析比较了各种技术的优缺点与应用状况.得出了用X射线显微成像技术和扫描透射电子断层扫描成像技术是目前检测微纳结构表面形貌及内部结构的最理想手段,前者更适合于对较厚微纳结构进行三维成像,后者的成像精度较高,并阐述了微纳结构几何特征检测技术的改进方向与发展趋势.

The geometric features of micro / nano structures have a critical influence on micro / nanostructured component＇s performance. It is inevitable to explore the high-efficiency and ultraprecision measurement techniques of micro / nano structural geometric features for developing high-performance micro / nano-structured components. This paper reviews the principle and application of existing techniques,mainly involving X-ray microscopy imaging, scanning-transmission electron microscopy tomography,electron microscopy,scanning probe microscopy,and laser scanning confocal microscope,analyses the advantages and disadvantages of the various existing techniques and their application status.Both X-ray microscopy imaging and scanning-transmission electron microscopy tomography are more preferable approaches to measuring micro / nano structural surface topography and inner structures,the former is more suitable for 3D imaging for thicker micro / nano structures,the latter has a higher imaging precision. Finally,improvement direction and development tendency of the measuring techniques for micro / nano structural geometric features are presented.