激光干涉仪的应用——激光干涉仪技术综述之五

Applications of Laser Interferometer

激光干涉仪具有测量范围大、精度高等特点,在各个领域得到广泛应用。本文介绍了激光干涉仪在数控机床检测、纳米测量、激光跟踪仪等方面的具体应用。

Since the laser interferometer has features like large measuring range, high accuracy and so on, it has been widely adopted in various applieation fields. This paper introduces the applications in NC machine tool testing, Nano - measurenlent, laser tracker measurement and other areas.