《薄膜物理与技术》课程教学改革探析

Exploration of Teaching Reform in Physics and Technology of Thin Films

随着微电子器件及制造技术的快速发展,薄膜物理与相关制备技术逐渐成为现代理工科大学生必须掌握的一门重要知识.本文分析《薄膜物理与技术》课程教学的内容、特点,以及存在的不足,探讨该课程的教学改革方法,从更新教学内容、更新教学方法、课堂教学与实验相结合等方面给出课程教学改革的建议.

With the rapid development of microelectronic devices and manufacturing techniques,thin film physics and the preparation techniques are gradually becoming an important course for college students of science and engineering. In this article,the teaching contents,teaching characteristics,and deficiencies of the course of the physics and technology of thin films were analyzed. The teaching reform of this course was ex-plored. The suggestions of updating the teaching content,renewing teaching method,and combination of class-room teaching and experiment teaching were given.