摘要
LDS(Laser Direct Structuring)激光打标机的振镜扫描系统存在失真问题,从而造成动态聚焦误差。对激光振镜扫描系统失真问题进行了详细理论分析,建立了该振镜扫描系统的数学模型,讨论了振镜动态聚焦误差来源和误差表现,提出了LDS振镜扫描系统误差矫正方法,通过实验验证了该方法的可行性。
Distortion exist in galvanometer scanning system of LDS( Laser Direct Structuring) laser marking system. And this problem may result in dynamic focus error. In this paper,the theoretical analysis of laser galvanometer system was presented. The mathematical model was established and solved as well. According to the analysis results,the cause and the performance of dynamic focus error are discussed. The corresponding error correction method is proposed. And this method is verified by experiment.
出处
《机床与液压》
北大核心
2015年第5期53-56,共4页
Machine Tool & Hydraulics
基金
广东省自然科学基金资助项目(S2012010009058)
深圳市战略新兴产业发展专项资金基础研究项目(JCYJ20120613105226998)
关键词
LDS
激光振镜
动态聚焦
误差分析
误差矫正
LDS
Laser galvanometer
dynamic focus
Error analysis
Error correction
