微光学系统矢量衍射成像中畸变的衍射机理与计算

Diffraction Mechanism and Calculation of Distortion in Vector Diffraction Imaging of Micro-optical System

用瑞利—索末菲矢量衍射公式导出微光学系统矢量衍射像点光强分布的计算式,探讨矢量衍射成像中畸变的衍射机理与计算。模拟试验表明微光学系统矢量衍射成像不但要考虑横向场还要考虑纵向场,畸变校正要进行位置校正,光强也要做适当校正,有利于微光学成像系统的像差分析与处理。

The formula for light intensity distribution of vector diffractive imaging point of micro - optical system is briefly derived with the Rayleigh - Sommerfeld vector diffraction firmula, then the diffraction mechanism of calculation of the distortion in vector diffraction imaging is discussed. Simulations shows that not only the transvele field also longitudinal field needs to be considered in the vector diffraction imaging of micro - optical system, not only position correction also in- tensity correction has to be appropriately done in distortion correction, These are helpful for aberration analysis and pro- cessing in favor of micro - optical imaging system.