菱形压电微位移放大机构的设计

Design of diamond piezoelectric micro displacement amplification mechanism

为提高叠层压电陶瓷作动行程,并使之具有往复对称作动的特性,提出一种基于三角放大原理的菱形压电微位移放大机构。该机构以叠层压电陶瓷作为驱动元件,利用三角位移放大原理,在放大叠层压电陶瓷位移输出的同时,实现在平衡位置两侧的双向主动输出。提出了相应的驱动方法,实现了对该机构输出方向和大小的控制。分析了机构的工作原理,通过解析计算得到该机构的理论放大倍数为2.9,与所建立有限元模型通过仿真计算得到放大倍数2.5相近。制作了试验样机并进行了试验验证,结果显示:该机构在驱动电压为200V时最大输出位移为(32±16)μm,对叠层压电陶瓷位移输出的放大比例为2.4倍,与理论计算相近;频率响应试验表明信号频率对位移输出影响较小。提出的设计方案实现了位移放大和位移双向主动输出这两个预期目标。

To improve the actuator stroke of laminated piezoelectric ceramic and to let it be with the ability of reciprocating symmetrical actuation, a diamond piezoelectric micro displacement amplification mechanism was proposed based on the triangle amplification principle.The laminated piezoelectric ceramic was taken as a driving element of the mechanism.On the basis of the triangle displacement amplification principle,a two-way active output on both sides of the equilibrium position was achieved while amplifying the output displacement of the laminated piezoelectric ceramics.A corresponding driving method was proposed to achieve the control of direction and magnitude of the output.The working principle of the mechanism was analyzed,and the geometric calculation results show that the magnification is 2.9,which is close to the simulation calculation magnification result2.5based on finite element model.A test prototype was developed to test the performance of the mechanism.The experimental results indicate that the maximum output displacement of the mechanism is 32microns（±16microns）when the driving voltage is 200 Vand its amplification is 2.4for the displacement of the laminated piezoelectric ceramic,which is close to the theoretical calculation.The experiment also showsthat the signal frequency has a minor effect on the displacement output.The mechanism achieves both of the displacement amplifications and two-way movement outputs as desired.