一种聚合物平板微器件的制造方法

A Novel Method for the Manufacture of Polymer Flat Micropart

以一种平板微器件-微流控芯片制造为研究对象,针对单一的注塑成型工艺难以保证器件的宏微形位误差的难题,提出了一种新颖的聚合物平板微器件集成制造方法。首先,设计并制造了一套注塑模具,其中采用双螺纹结构将微镶件和定模架相连,对注塑工艺参数进行优化,制得填充率接近1的平板微制件。然后,对平板微制件进行了基于视觉对准的铣削整形和热压整平,有效改善了制件的宏微形位误差和平面度误差。最后,利用加工的器件进行装配,形成微流控芯片,并对芯片进行了流量测试和疲劳测试。实验结果表明:采用提出方法制造的微流控芯片,各项精度指标和性能可以满足实际使用要求,工艺成果对同类器件的研发和生产提供了借鉴和指导。

It is diffwult to effectively control the macro-micro error of polymer fiat micropart only using a single process of injecting. In order to solve this problem, the fabrication of typical polymer flat micropart （microfluidic chip） was studied. A new integrated manufacturing method for polymerflat micro-part was presented：first, an injection＂ mould was designed, where the micro-insert was connected with the fixed mould base by the structure of double screw thread. The parameters for the injection molding were optimized to make the filling ratio of microchannels close to 1.0. Second, the milling based on vision alignment was suggested to decrease the form and position macro-micro error. Third, the hot-pressing process was applied to improve the flatness error of the micropart. Finally, the micro-part and another polymer plate were assembled together to form the microfluidic chip. With the microfluidic chip, both the flow characteristic and its fatigue peormance were tested. Experimental results showed that the accuracy and peormance of the micro-part could meet the requirements. Thus, the method of this paper provided a useful reference for the fabrication of similar microparts.