电子材料气体乙硅烷的合成研究

Research of Synthesis Process in Electronic Material Disilane Gas

乙硅烷是一种主要用于太阳能电池生产的电子气体,与硅烷相比具有沉积速率快、沉积温度低的优点。本实验采用卤代乙硅烷还原法制得了一定量的乙硅烷,并优化了反应装置连接线路。通过采用GC9560氦离子化气相色谱仪分析检测,本实验验证了反应物的添加顺序及反应物的添加比例对所得产物产率的影响。

Disilane is a kind of electronic gases which are mainly used in Solar cell manufacture and it has the advantage of fast deposition, low deposition temperature compared with silane. This experiment adopts Halogenated disilane reduction method to manufacture a certain amount of disilane, and it optimizes the reaction device connections. By adopting GC9560 helium ionized gas chromatography to analysis and test it, the experiment verify the effect of the adding order of reactant and the amount of reactant on the productive rate of product.