遗传算法设计电磁屏蔽减反膜

Design of EMI Shielding Broadband Antireflective Coating by Genetic Algorithm

将电磁屏蔽层ITO薄膜作为一层光学薄膜,与TiO2、SiO2、MgF2一起,设计了宽带电磁屏蔽减反膜。给出了含有单层、双层、三层ITO的电磁屏蔽减反膜的膜系结构,其在可见光范围内剩余反射率均小于0.5%,满足ISO9211标准。该薄膜既具备光学减反效果,同时又具备电磁屏蔽功能,可以用作电磁屏蔽视窗。

EMI shielded windows contain ITO and anti-- reflection coating in terms of G 丨 ITO 丨AR丨Air multilayer structure are designed by genetic algorithm. Single , double,and trible ITO layers contained multilayer optical coating are made respectively, which all show excellent EMI shielding performance and reflection of 0.5% , lower than traditional single ITO EMI shielded windows, meeting the standard of the ISO9211. The optimized process are also detailed herein.