摘要
六氟丁二烯是一种优异的蚀刻气体,应用前景广阔。介绍了六氟丁二烯的性质和应用,根据不同的制备关键中间体对其合成方法进行了分类评析,指出了各种制备方法的优缺点。综合各方法的特点,指出了今后制备六氟丁二烯的方向。
Hexafluoro-1, 3-butadiene is a kind of excellent etch gas with broad application prospect. In this paper, properties and application of hexafluoro-1, 3-butadiene were introduced, and its synthesis methods were compared and evaluated, advantages and disadvantages of these methods were pointed out. After analyzing the characteristics of each method, the futureresearch direction was proposed.
出处
《当代化工》
CAS
2015年第3期534-536,共3页
Contemporary Chemical Industry
关键词
六氟丁二烯
性质
应用
合成方法
hexafluoro-1,3-butadiene
property
application
synthesis methods
