高稳定性单晶硅压力(差压)变送器的实现

Implementation of the Monocrystalline Silicon Pressure/Differential Pressure Transmitters with High Stability

当前高稳定性压力(差压)变送器在自动化领域的应用越来越重要,如何发展具备中国自主知识产权的高稳定性变送器是中国本土变送器制造厂商面临的一个非常严峻的问题。从超稳型单晶硅原理芯片的选择、超稳型单晶硅硅片的无应力封装、回程误差的消除、静压误差的减弱和补偿、仪表量程比的拓宽、接液面的特殊处理以及超高温测量等诸多技术方面,详细说明了提升高稳定性压力(差压)变送器全性能、准确度等级和可靠性的技术和措施,弥补了国外高端压力(差压)变送器对中国市场的技术垄断。

At present, high stability pressure/differential pressure transmitters become more and more important in automation application field. The local Chinese manufacturers of transmitters are facing a very serious mission of how to develop the transmitters with high stability and independent intellectual property rights. For enhancing the entire performance, accuracy＇level and reliability of the high stability pressure （ d/p） transmitters, various technologies and measures are described in detail, including the selection of ultra-stable type monocrystalline silicon chips ; the stress-free encapsulation of ultra-stable type monocrystalline silicon chips ; elimination of the hysteresis error; reduction and compensation of the static pressure; broadening the turndown ratio of the instrument; special treatment of liquid surface contacted; and measurement of super-high temperature, etc. The implementation resists the technical monopoly of foreign high-end pressure （ d/p ） transmitters on the Chinese market.