原子力显微镜矩形测力臂弹性系数计算方法研究

Calculation methods of the spring constant in atomic force microscope rectangular cantilever

原子力显微镜测力臂弹性系数的准确性直接影响其测量精度,是仪器标定的一个重要指标。分别运用理论计算方法、动态计算方法和静态计算方法计算原子力显微镜测力臂弹性系数。以矩形测力臂为例,对其进行灵敏度分析,找出影响测力臂弹性系数的参数。分别选取矩形测力臂原始参数值及参数上下极限值,构成3组实验数据。利用上述3种计算方法,分别计算出3组不同参数值的矩形测力臂的弹性系数,然后对这3种计算方法计算所得的弹性系数进行分析并和生产商给出的名义值进行比较,所得结果为原子力显微镜矩形测力臂弹性系数的精确计算提供参考。

The spring constant of the Atomic Force Microscope （ AFM） directly affect the accuracy measurement ,which is an im-portant index for the AFM ,uses three methods to calculate the spring constant of the AFM ,namely,the theoretical method ,dynam-ic method and static method .Based on rectangular cantilever as an example ,adopts sensitivity analysis to identify the parameters that affect the spring constant ,and divided the upper and lower limits of the parameters into three groups .Calculate respectively the spring constants using the three kinds of calculation methods .Compare the results each other and compare them with the nom-inal value given by the manufacturer ,to provide the reference for the calculation methods of the spring constant in AFM .