摘要
简单介绍了扫描电镜背散射电子成像的工作原理及其应用.利用扫描电镜背散射电子成像结合X-射线能谱来研究样品的微区成分变化,从而快速的了解样品的组成和结构特征,为物相的鉴别提供了有效的分析手段.
The basic principle and application of the back scattered electron （BSE） images of scanning electron microscope （SEM） is described. BSE imaging combined with X-ray energy dispersive spectrum of SEM was used to study the composition changes in the micro areas of samples, so as to understand the composition and structure characteristics of samples in a short time, thus providing an effective analysis method for the phase identification.
出处
《分析测试技术与仪器》
CAS
2015年第1期54-57,共4页
Analysis and Testing Technology and Instruments
关键词
扫描电镜
背散射
成分衬度
scanning electronic microscopy
backscattered electron image
composition contrast
