表面改性后的SiO_2薄膜光学性能研究

Study on the Optical Properties of SiO_2 Thin Films after Surface Modification

用溶胶-凝胶法在酸碱复合催化条件下制备了Si O2溶胶,采用浸渍提拉法在K9玻璃上制备了性能稳定的Si O2薄膜,并用三甲基氯硅烷对Si O2薄膜进行了表面改性。用反射式椭圆偏振光谱仪测试薄膜的椭偏参数,并用Cauchy模型对椭偏参数进行数据拟合,获得了Si O2改性前后在300~700 nm波段的色散关系。讨论了薄膜改性与光学性能间的关系。结果表明：Cauchy模型能较好的描述溶胶-凝胶薄膜在300~650 nm波段的光学性能;表面改性后Si O2薄膜光学常数发生改变,但未影响色散关系的变化趋势;薄膜改性后具有随着膜层数的增加,折射率增加,而最大峰值透光率、孔隙率减小的规律,且薄膜改性后表面更加致密。

The Si O2 sol were prepared by sol-gel method based on base / acid composite catalysis methods,and Si O2 thin films were deposited on K9 glass by dipping pulling method and then surface was modified by trimethylchlorosilane. The optical properties of the films were characterized by spectroscopc ellipsometer; the Cauchy model was presented in fitting spectroscopic ellipsometric data in 300-700 nm waveband for the film optical constants. At the same time the relation between membranes surface modification and optical properties was also discussed. The results show that Cauchy model could describe optical properties of Si O2 film very well in 300-650 nm waveband. The modified films have a law that with increasing the number of layers, the refractive index increases, and the maximum peak transmittance and porosity reduce,and the surface of modified film is more dense.