压电悬臂梁式微型电场传感器的设计与制备

Design and Fabrication of an Electric Field Microsensor Based on the Structure of Piezoelectric Cantilever Beams

提出并研制一种新型压电悬臂梁式微型电场传感器,该传感器是基于压电(PZT)薄膜驱动的悬臂梁式微型电场传感器;同时介绍了传感器的工作原理、结构设计、制作工艺以及初步测试结果。该微型电场传感器由多根压电悬臂梁构成,每根悬臂梁能同时具有屏蔽电场和感应电荷功能。对传感器感应电荷的能力进行了计算;并根据计算结果和工艺要求设计了传感器的参数。该微型电场传感器采用微加工技术制作,每根悬臂梁为多层复合结构(Al/Si3N4/Pt/PZT/Pt/Ti/Si O2/Si),其中PZT薄膜采用溶胶-凝胶法制备。测试结果证明,传感器具有良好的响应特性。

A new electric field microsensor based on the structure of PZT（ Pb ZrxTi（ 1- x）O3） piezoelectric cantilever beams is presented. The design,fabrication and preliminary experimental result of the electric field microsensor are described. This sensor consists of piezoelectric interdigitated cantilever beams. Each beam is a multilayer compound structure（ Al / Si3N4/ Pt / PZT / Pt / Ti / Si O2/ Si）,and it has the function of shielding electric field and inducing charge. The ability of induced charge and driving mechanism were simulated by finite element analysis method,and the simulation result was adopted as reference. The electric field microsensor was fabricated by MicroElectromechanical Systems（ MEMS） technique,and the PZT layer was prepared by sol-gel method. The preliminary experimental result showed that this microsensor has a good response to the intensity of applied electric field.