基于光电混合细分的激光自混合干涉测量技术

Laser self-mixing interferometry measurement technology based on photoelectric hybrid subdivision

为了提高激光自混合干涉仪在大量程运动距离测量中实时测量的分辨率,采用光学细分与电子细分相结合的方法,大幅减轻了在条纹计数法中对信号进行大量电子细分的软硬件压力,节省了硬件成本,降低了测量系统的复杂程度,满足了大量程运动距离实时测量的精度要求。使用PI公司高分辨率商用导轨标定了运动距离测量的实验结果,分析误差来源,得出了实际测量精度。结果表明:在百毫米大尺度运动距离的测量中精度能够达到μm级。

To improve the measurement resolution of laser self-mixing interferometer in wide range real-time movement distance measurement and reduce the software and hardware pressure of a large number of electronic signal subdivision in fringe counting method greatly,the combination of optical and electronic segment subdivision method was adopted.Hardware cost is saved and complexity of the measurement system is reduced.At the same time,the system satisfies accuracy requirement in the wide range real-time movement distance measurement.PI’s high-precision commercial displacement platform calibrates the experiment results in the movement distance measurement.The error source is analyzed and the actual accuracy of measurement is concluded.Result shows the measurement precision can reach the level ofμm in the hundreds mm large scale movement distance measurement.