9[1]Buckberry C, et al. The application of high-speed TV - holography to time-resolved vibration measurements. Optics and Lasers in Engineering ,2000; 32:387-394
10[3]Petra Aswendt, et al. ESPI solution for non-contacting MEMS-on-wafer testing. Optics and lasers in Engineering, 2003; 40:501-515