大距离孔系同轴度测量装置专用校准系统研究

Calibration system of coaxiality measurement device about big distance of porous parts

针对大距离孔系同轴度测量装置精度校准的问题,对同轴度误差来源、多孔系工件同轴度测量方法、误差计算模型方面进行了研究,对孔系同轴度测量装置校准系统的原理与组成进行了归纳,建立了校准系统的结构与控制模型,提出了一种专用校准方法,通过提供一组轴线位置变动量已知的标准孔系模拟装置,将同轴度测量装置测得值与标准值相比较,以此得出了被校准装置的测量误差。该校准系统由自行设计的三维精密运动平台与标准环规组成,采用光栅尺作为系统定位元件,采用TMS320F2812作为系统的主控芯片,并提出了基于最小二乘原理的同轴度最小区域算法。研究结果表明:该校准系统分辨率达到1μm,系统不确定度达到8.12μm,能够快速、有效地校准大距离孔系同轴度测量装置的精度误差。

Aiming at the precision calibration problems of coaxiality measurement device about big distance of porous parts,the coaxiality error sources,measurement methods for porous parts,error calculation models were researched,the principle and constitution of calibration system were summarized,the calibration system structure and control model were established. A special coaxiality method was proposed to provide a group of standard porous parts simulator whose coaxiality is known. The actual value acquired by the coaxiality measurement device was compared with the standard value to get the measurement error. This calibration system consisted of threedimensional precision motion platform and ring gauge,the grating ruler was selected to measure the displacement,and TMS320F2812 was selected as the system control chip,the minimal region algorithm based on the least square principle was proposed to calculate the coaxiality of standard porous parts. The results indicate that this system resolution can reach 1 μm and the uncertainty can reach 8.12 μm,and it can effectively calibrate the precision error of coaxiality measurement device.