摘要
在MEMS矢量水听器现有结构的基础上,设计出一种新型减振结构,期望利用该封装结构衰减水听器工作时安装平台的振动噪声,削弱安装平台振动对水听器测量精度的影响,提高水听器的抗噪能力。结合理论分析确定减振材料并采用有限元软件进行仿真,对矢量水听器先后采用原有封装结构和减振封装结构进行封装,并通过振动台实验和驻波桶灵敏度测试。测试结果表明:该结构可有效实现对MEMS矢量水听器干扰信号的衰减,同时基本不影响水听器的接收灵敏度。
A novel vibration-isolation packaging structure is designed based on the existing structure of MEMS vector hydrophone. It is desirable that this novel structure can isolate the vibration noise caused by working platform and improve the anti-noise ability of hydrophone. This novel structure is made of polyurethane （ PU） rubber which is manufactured with a certain proportion. According to the size of existing hydrophone,the geometry dimensions are determined. The hydrophone is fabricated in the form of original packaging structure firstly and then in vibration-iso-lation packaging structure. The shaking table test and sensitivity test are conducted. The results show that the vibra-tion-isolation packaging structure can effectively isolate the interference signal produced by working platform without affecting the sensitivity of hydrophone obviously.
出处
《传感技术学报》
CAS
CSCD
北大核心
2015年第3期336-341,共6页
Chinese Journal of Sensors and Actuators
基金
国家863项目(2013AA09A412)
国家自然科学基金项目(61127008)
国家自然科学基金项目(51205374)
关键词
MEMS矢量水听器
减振
阻尼材料
损耗因数
封装结构
MEMS vector hydrophone
vibration-isolation
damping material
loss factor
packaging structure
