摘要
阐述一种非平面直写式光刻的电控系统、工作原理及组成,通过高效的控制方法,提高控制精度,实现工艺要求。
This paper will elaborate control system of a kind of non planar direct write lithography, introduced the working principle of non planar direct write lithography, the composition of control system, the control method is efficient, and improve the control accuracy, the realization of the process requirements.
出处
《电子工业专用设备》
2015年第3期46-51,共6页
Equipment for Electronic Products Manufacturing
关键词
非平面直写式光刻
振镜扫描
PID算法
伺服系统
Non planar direct write lithography
Galvanometer scanning
PID algorithm
Servo system
