摘要
为了研究双光子聚合加工光路系统对聚合效果的影响,使用ZEMAX软件对光路系统的3个主要部分,即扩束镜、扫描振镜和聚焦透镜分别进行了设计,然后将3个部分结合到一起,从整体上模拟了整个光路系统,并且在光路中放置探测器来监控激光光束的变化情况。从模拟结果中可以直观清晰地观察到激光光束的能量分布在光路中的变化情况,主要分析了扩束镜对最终聚焦效果的影响。结果表明,扩束倍数越大,扩束镜越靠近光源,聚焦后焦点处的能量越高。该模拟结果也为实际实验系统的搭建提供了依据。
In order to study effect of optical route of two-photon polymerization on polymerization result,firstly,the mainly three parts i. e.,beam expander,scanning galvanometer and focus lens were designed with ZEMAX software.Secondly,the whole optical route was simulated after combining the three parts together. The changes of the beam were monitored at different positions of the route with a detector. The variation of laser energy distribution could be seen in simulated diagrams and the influence of beam expander on the final focal results was analyzed. The results show that the larger the amplification multiple of the beam expander the smaller the distance between the beam expander and the light source,and the higher the energy density on the focus spot. The simulation results also provide the basis for actual experiment system construction.
出处
《激光技术》
CAS
CSCD
北大核心
2015年第3期325-328,共4页
Laser Technology
关键词
激光技术
双光子聚合
光路模拟
ZEMAX软件
飞秒激光
laser technique
two-photon polymerization
light route simulation
ZEMAX software
femtosecond laser