摘要
金属表面颗粒污染物是影响高功率激光系统运行环境的因素之一。为了量化高功率激光系统金属结构框架在清洗后、安装时以及工作后表面的洁净度和颗粒分布状况,需要有效地采样、测试方法及采样装置。首先介绍了粘结法和负压法及其采样装置,然后开展了相关试验研究。实验表明,粘结法、负压吸取法均可以采集到小至1μm的颗粒物,且方法操作简便,实用性强,可以满足工程的实际需要。
The particulate contamination on metal surface is one of the factors which affect the high-power laser system operating environment。 In order to quantify the cleanliness level of metal structure after cleanout,installation and work,it need efficiently sampling,testing method and sampling device.This paper firstly introduced tape sampling method and microvacuum sampling method and devices,then carried out the experimental studies. Experimental results showed that two sampling methods could collected particles as small as 1μm. Moreover,the methods were simple,practical,and could meet needs of practical engineering.
出处
《真空与低温》
2015年第2期86-91,共6页
Vacuum and Cryogenics
基金
真空低温技术与物理重点实验室基金项目(9140C550211120C5501)
关键词
高功率激光系统
粒径大小及分布
质量面密度
highly power laser system
particle size and distribution
areal density of particulate mass
