摘要
During the irradiation of Ge surface with Ga＋ ions up to 1017 ions.cm 2, various patterns from ordered honeycomb to nanograss structure appear to be decided by the ion beam energy. The resulting surface morphologies have been studied by scanning electron microscopy and atomic force microscopy. For high energy Ga＋ irradiation （16-30 keV）, by controlling the ion fluence, we have captured that the equilibrium nanograss morphology also originates from the ordered honeycomb structure. When honeycomb holes are formed by ion erosion, heterogeneous distribution of the deposited energy along the holes leads to viscous flow from the bottom to the plateau. Redistribution of target atoms results in the growth of protuberances on the plateau, and finally the pattern evolution from honeycomb to nanograss with an equilibrium condition.
During the irradiation of Ge surface with Ga＋ ions up to 1017 ions.cm 2, various patterns from ordered honeycomb to nanograss structure appear to be decided by the ion beam energy. The resulting surface morphologies have been studied by scanning electron microscopy and atomic force microscopy. For high energy Ga＋ irradiation （16-30 keV）, by controlling the ion fluence, we have captured that the equilibrium nanograss morphology also originates from the ordered honeycomb structure. When honeycomb holes are formed by ion erosion, heterogeneous distribution of the deposited energy along the holes leads to viscous flow from the bottom to the plateau. Redistribution of target atoms results in the growth of protuberances on the plateau, and finally the pattern evolution from honeycomb to nanograss with an equilibrium condition.
基金
supported by the National Natural Science Funds for Excellent Young Scholar,China(Grant No.51222211)
the National Natural Science Foundation of China(Grant Nos.61176001 and 61006088)
the National Basic Research Program of China(Grant No.2010CB832906)
the Pujiang Talent Project of Shanghai,China(Grant No.11PJ1411700)
the Hong Kong Research Grants Council(RGC)General Research Funds(GRF),China(Grant No.112212)
the City University of Hong Kong of Hong Kong Applied Research Grant(ARG),China(Grant No.9667066)
the International Collaboration and Innovation Program on High Mobility Materials Engineering of Chinese Academy of Sciences
