小型化MEMS陀螺仪标定平台的设计

The Design of Miniature Calibration Platform for MEMS Gyroscope

基于角速率转台体积大、结构复杂、标定范围小、移动性差等现状,设计了一种标定范围广的小型化MEMS陀螺仪标定设备,在此基础上提出了一种角速度积分标定方法,通过将陀螺仪电压信号积分值与实际转动角度进行线性拟合,从而求得陀螺的标度因数。实验表明,该系统标定原理简单可靠,并且标定精度取决于角位置精度和角位移量,降低了对角速度精度的要求,从而大大减小了设备体积和设计难度。

Based on the fact that rate turn table has disadvantages of big volume,complicate structure,limited range and mobility, designed a high-ranged miniature calibration device for MEMS gyroscope,and then put forward a new calibration method of rate integration,which obtains the scale factor of gyroscope by linear fitting the integral voltage value of it and the angular displacement information from turn table. Experiments show that this calibration method is simple and reliable and the calibration accuracy depends on angular position precision and angular displacement more than rate accuracy,decreasing the design requirement and volume.