全自动硅片清洗设备的多线程软件设计

Multithreading of Automatic Single Wafer Wet Process Equipment

介绍了硅片的全自动单片湿法工艺设备的基本结构,重点阐述了此设备的控制逻辑及优化方案。在软件的开发过程中,采用多线程设计,提高了设备的生产效率和可靠性。

This paper introduced the basic structure of automatic single wafer wet process equipment,especially expatiated the control logic and optimization, in the development of the software system,used the multithread programming, improved the productivity and dependability of the equipment.