LTCC工艺评价试验方法

Test Methods for Evaluation of LTCC Manufacturing Process

结构分析(CA)或破坏性物理分析(DPA)试验可以有效地评价低温共烧陶瓷(LTCC)元器件的制造工艺质量。分析试验需对LTCC器件做剖面制样,重点考察通孔剖面处的工艺质量。采用样品固定、试样磨抛和试样腐蚀3个阶段配合完成剖面制样的新试验方法,得到了比传统试验方法清晰的试样剖面,有效地暴露了试样工艺缺陷,可以作为评价LTCC工艺质量的有效试验方法进行推广应用。

Low Temperature Co-fired Ceramic （LTCC） manufacturing process can be evaluated by the Construction Analysis （CA） or Destructive Physical Analysis （DPA） test. LTCC devices sectional sample obtained by testing, and process quality througil-hole cross section is the focus of the study. A sample section which is clearer than the traditional ones has obtained through a new test method. The method consists of three steps： fixing, grinding and etching the sample, and it can effectively expose the vulnerability of the workmanship samples. Therefore, it can be widely applied as an effective test method to evaluate the quality of LTCC manufacturing process.