超精密定位工作台静压导轨静态特性及流场仿真分析

Simulation Analysis on Static Performance and Streamline Field of Hydrostatic Guideways of Ultra-precision Positioning Stage

研究超精密液体静压定位工作台中的液体静压导轨静态特性问题。根据流体润滑理论及雷诺方程,构建了导轨油膜压力的数学物理模型,运用有限元方法求解静压导轨的各项静态特性参数,如导轨的承载能力、静刚度、流量等。运用三维造型软件Solid Works和CFD软件FLUENT,从结构三维造型设计和内部三维流动综合分析液体静压导轨,获得油膜压力的分布云图、曲线和油腔液压油流速分布云图,并分析不同结构设计参数和环境参数对液体静压导轨静态特性的影响。本文研究将对实际的静压导轨系统设计具有指导意义。

The problem of static performance for the hydrostatic sliding guideways of the ultra-precision hydrostatic positioning table was studied. Based on the hydro-lubrication theory and the Reynolds equations,the mathematical physics model of the oil film pressure of guideways was built. Finite element analysis（ FEA） method was applied to solve each parameter of the static performances of the hydrostatic guideway,such as bearing capacity,static stiffness and flux,and etc. By using three dimensional（ 3-D） modeling Solidworks and the CFD software FLUENT,a comprehensive analysis was conducted on the hydrostatic guideways from the 3-D structure modeling design and interior 3-D flow,so as to achieve the contour band and curves of the pressure distribution of the oil film as well as the hydraulic oil flow velocity distribution of the oil curve. Moreover the influences of the design parameters of different design and the environmental parameters on the static performance of the hydrostatic guideways were analyzed. This study result therefore is instructive for the design of the actual hydrostatic guideway system.