摘要
自动工艺流程生成器对于集成电路生产自动化具有重要意义。文章介绍了一种工艺流程生成程序 My APG,对于程序所用到的工艺库和工艺步骤合并的处理进行了详细说明 。
An automatic process generator, MyAPG, which is very important to VLSI manufacture automation, is described in the paper The process library and the algorithm for process step combination, which are critical in the program, are discussed in detail An Al gate CMOS process is illustrated as an example of MyAPG application
出处
《微电子学》
CAS
CSCD
北大核心
2002年第2期124-127,共4页
Microelectronics
