基于光学扫描法的导轨直线度测量方法

Straightness measurement of guide rail based on optical scanning method

基于多测头光学扫描法对导轨直线度的在位测量方法,提出一种新的倾角补偿的三测头扫描方法。介绍了测量原理,推导了基于最小二乘法的直线度形状重构方法,重构出的形状可精确反映直线度误差的高频成分,且对测量噪声有良好抑制能力。对算法进行了仿真验证,并由实验验证了提出方法的有效性。实验结果表明,该方法可以精确地还原出台阶状的直线度形状,测量标准偏差在10μm以内。

An online measurement method of straightness is studied based on multi-probe optical scanning method.A three-probe scanning method with tilt compensation is proposed.Reconstructed form can accurately express the high frequency elements of the straightness error,and owns better suppression capability of the measurement noise.The measurement principle of the proposed method is introduced firstly.The construction algorithm of the straightness errors is deduced based on the least square solution and the computer simulation is performed.The experimental system is built for verificating the validity of the proposed method.The experimental results show that the proposed method can accurately reconstruct the straightness errors of step form,and the standard deviation is less than 10 micrometer.