非线性低频全息光栅的制作及其栅距测量

Nonlinear Low-Frequency Holographic Grating's Fabrication and Pitch's Measurement

提出了一种满足非线性低频全息光栅设计、制作、测量等需求的新思路,设计了光路调制、元件制作及其条纹观察、栅距测量的新方法。选用迈克尔逊干涉仪调制出符合设计要求的非线性低频全息光栅,在全息光刻法下完成制作,用光学显微镜加计算程序法观察其条纹结构,测量了其栅距。采用EXCEL技术分析非线性低频全息光栅的条纹间距随级次变化的趋势曲线,找出了栅距随光栅级次变化区域的最佳模拟曲线及方程。

This paper proposed a new idea to meet the needs of the non-linear low-frequency holographic grating＇s design,production and measurement and got new methods of optical modulation,device fabrication,stripe observation and pitch measurement. A Michelson interferometer was selected to modulate out of the nonlinear low-frequency holographic grating that meets the design requirements.We produced it with the method of holographic lithography and observed its stripe structure in the optical microscope and measured its pitch with calculation procedure method. We analyzed the trend graph that the nonlinear grating pitches following with the change of the grating orders through EXCEL to find out the best simulated curve and equation of the region that its pitch changes with the grating orders.