摘要
为了研究同步移相干涉仪中延迟阵列的移相特性,采用琼斯矢量和琼斯矩阵作为偏振光和偏振光传递的参量和模型,分析推导了延迟阵列的移相量与快轴方位角误差之间的传递关系,给出了误差传递函数公式,在没有精确校准延迟阵列快轴方位角的情况下,搭建了基于延迟阵列移相的测量装置,利用该装置和Zygo GPI XP型干涉仪测量同一块球面镜,测量波面均方根值相差0.003λ,峰谷值相差0.033λ。讨论了延迟阵列方位角误差容限和延迟量误差、偏振片透光轴方位角误差对测量结果的影响。
To study the phase- shifting characteristic of retarder array in simultaneous phase- shifting interferometry, the relationship between phase shift and fast-axis azimuth error is deduced through Jones vector and Jones matrix, and the error propagation formula is given. A spherical mirror is measured by simultaneous phaseshifting interferometer based on retarder array without calibrating fast-axis azimuth accurately and Zygo GPI XP interferometer, the difference of root-mean-square and peak-to-valley are 0.003 l and 0.033 l respectively. The influence of azimuth error tolerance and phase shift error of retarder array and optical axis azimuth error of polarizer is discussed.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2015年第4期187-193,共7页
Acta Optica Sinica
基金
国家自然科学基金(61108041
U1231111)
关键词
测量
光学测量
干涉
同步移相
延迟阵列
measurement
optical measurement
interferometry
simultaneous phase-shifting
retarder array
