二维全谱高分辨中阶梯光谱仪光学系统设计

Optical Design of High Resolution Two Dimension Echelle Spectrometer

传统的罗兰圆光谱仪和Czerny-Turner型光谱仪常常采用刻线密的光栅和大的成像焦距,来提高其光谱分辨率,其结果导致成本高和仪器体积庞大。为了克服这一缺点,提出了一种中阶梯光栅和低色散棱镜相结合的光谱仪光学系统设计方法。具体分析了中阶梯光栅的基本原理和使用方法,给出设计基于中阶梯光栅的光谱仪基本步骤,并且实际设计了基于中阶梯光栅的高分辨光谱仪光学系统,焦距为400 mm,可在全谱工作波段180～800 nm成二维光谱。Zemax光学设计软件对光学系统进行光线追迹结果表明,该系统环围能量在单个CCD像素（24 mm×24 mm）内达到50%～70%以上,200 nm处分辨率可达0.00675 nm,完全满足设计指标要求。

The dense grooves grating and long camera focus are usually used to obtain high optical resolution in traditional Rowland and Czerny-Turner spectrometers. To avoid expensive cost or large volume of spectrometers,a novel optical system based on echelle and low dispersion prism with high optical resolution is presented. Firstly,the principle and application method of echelle are deduced in details. Secondly, the design steps are provided to set up a optical system with echelle. Finally, an optical system example based on echelle grating is designed. Its camera focus is 400 mm with wavelength range of 180～800 nm, the spectrograph can be imaged on the two dimension area at the same time. The ray tracing and optimization to the optical system are carried out with Zemax software, and the results show the encircle energy in a single CCD pixel（24 mm×24 mm） area can reach 50%～70%above within wavelength range of 180～800 nm, the resolution is 0.00675 nm at 200 nm, and it is enough to meet applications of distinguishing most elements.