应用于惯性约束聚变的激光微加工技术研究

The Research of Laser Micro-machining Used in Inertial Confinement Fusion

各种式样的针孔板以及狭缝片是惯性约束聚变（ICF）以及高能量密度物理（HEDP）实验研究中诊断设备的重要构成部分.从实验诊断中所需求的多种结构类型的针孔板/狭缝片出发,针对激光微加工加工参数进行了细致的性能研究优化了针孔板参数指标,同时针对狭缝片加工创新地提出了“三段式”新型加工工艺,提升了狭缝片参数指标.最终,针对孔径在12 ～ 15 μm的4X4针孔阵列板其孔径一致性从40％提升到20％,缝宽20 μm的狭缝片其平整性从±5μm提升到±2μm,解决了100×100超大型针孔阵列出现的针孔形状不规则问题,显著地提升了实验诊断所用的针孔板/狭缝片的性能.

The Pinhole array and slit is the most important part of diagnostics in inertial confinement fusion and high energy density physics. In this work, the influence of manufacture parameters [ such as laser electric current （ A）, laser frequency （ kHz）, ablating time （ms） ] are collected. At the same time, a novel manufacture technique for high quality slit machining is proposed. Finally, the 4 × 4 pinhole array aperture uniformity upgraded from 40% to 20% ; and the slit roughness upgraded from ± 5 μm to ±2 μm.