高品质因子聚合物可重构微环谐振腔滤波器

A reconfigurable polymer micro-ring resonator filter with high quality factor

以聚合物ZPU-44和聚砜（PSU,polysulfone risin）分别作为波导包层和芯层材料,采用倒脊形波导结构,设计并优化了聚合物可重构微环谐振腔滤波器的波导截面参数、弯曲半径、耦合区波导长度和间距以及调谐电极等结构参数,分析了其谐振滤波特性。采用传统的微加工工艺制备了聚合物可重构微环谐振腔滤波器并进行了测试。结果表明,其在通信波段1 550nm附近的自由光谱范围（FSR）为0.15nm,3dB带宽约为0.023 5nm,品质因子Q达6.60×10^4,在0~4V电压范围内实现了0.5~12.95dB消光比的调谐,且谐振波长调谐一个FSR的电压为4.75V,与理论设计基本相符。本文的聚合物可重构微环谐振腔滤波器可用于集成波导可调谐光延时线和可调谐滤波。

A polymer reconfigurable micro-ring resonator filter, which is based on inverted ridge wavegnide structure using ZPU-44 and polysulfone （PSU） as the waveguide cladding layer and core layer materials, respectively,is theoretically designed and optimized,including the wavegnide cross section size, the bending radius, the coupling length, the coupling gap size, and the thermo-optic tuning electrode pa- rameters. In addition,the characteristics of the polymer reconfignrable micro-ring resonator filter are ana- lyzed. The polymer reconfignrable micro-ring resonator,which is fabricated by the traditional micro pro- cessing technology, is tested, and the results show that around the wavelength of 1550 nm, the free spec- tral range （FSR）, 3 dB bandwidth and quality factor Q of the polymer reconfigurable micro-ring resona- tor are 0.15 nm,0. 023 5 nm and 6.60 × 10 4 , respectively. What＇s more,the extinction ratio of the micro- ring resonator filter can be tuned from 0. 5 dB to 12.95 dB in the voltage range from 0 V to 4 V. And only 4. 75 V is needed to tune the resonant wavelength of the micro-ring resonator filter across an FSR, which is nearly the same as the simulation results. The reconfignrable polymer micro-ring resonator filter is very useful for integrated waveguide tunable optical delay line and tunable filter.