双足步进作动压电直线电机的工作机理及试验

Principle and Experimental Research on Piezoelectric Linear Stepping Motor with Double Driving Feet

大行程和高精度是半导体加工、光波导封装等现代精密制造领域对作动器提出的新要求,在传统作动器中这两个特性往往相互矛盾从而难以同时具备。为获得满足这一要求的作动器,基于叠层压电堆器件的特点提出了一种新型步进压电直线电机的原理,详细分析了它的作动机理,该原理方案具有较大的作动行程和较高的步进分辨率,同时其输出推力与预压力成正比,有望获得较大的推力和自锁力。在原理分析的基础上,设计了电机的结构方案并加工了样机,讨论了该电机对装配的特殊要求并对样机的装配进行了验证试验,样机作动试验结果验证了该原理方案的可行性,并且在直流偏置50 V、峰峰值为100 V、频率10 Hz的正弦电压激励下,样机的平均速度达63.3μm/s,这与理论计算的相对偏差为6.9%。

In modern precision manufacturing industry such as semiconductor fabrication and optical waveguide packaging,the requirements of the long traveling stroke and high resolution,which are hard to achieve simultaneously with a traditional actuator,become urgent.To develop such an actuator,this project aims at developing novel linear stepping motor using stacked piezoelectric actuators.The operation principle of this linear piezoelectric motor is analyzed,which shows that its thrust increases with preload and that it is capable of large thrust and holding force with the power off.Based on analysis of this principle,aproof of concept prototype is fabricated,and specific requirements of assembly are discussed.The principle is validated through testing.By applying a voltage signal of peak to peak value 100 V with 50 V offset and a frequency of 10 Hz,the prototype′s speed reaches 63.3μm/s,with a difference of 6.9% to that of the analytical results.