纳米针状金刚石膜的制备

Preparation of nano-needles shape diamond films

利用高功率微波等离子体化学气相沉积方法在硅衬底上沉积了多晶金刚石薄膜,然后利用电子束蒸发方法在金刚石薄膜表面上沉积了5 nm厚的Pt薄膜.利用Pt的自组织化效应,再通过氢等离子体照射、氧等离子体刻蚀、王水处理等手段,使金刚石薄膜表面形成了纳米针.利用拉曼光谱和扫描电子显微镜(SEM)表征金刚石薄膜的结构,拉曼光谱显示在1 315 cm^(-1)处出现纳米金刚石特征峰,SEM显示纳米针均匀地直立在金刚石薄膜表面,每平方厘米大约含有10~8个纳米针,纳米针的平均高度约为1μm.

Polycrystalline diamond thin films were deposited on silicon substrates by means of a high power microwave plasma chemical vapor deposition （CVD）method.A 5 nm Pt thin film was deposited on such dia-mond films by electron beam evaporation.Nano-needles were formed on the surface of diamond thin films by using a self-assembling process of a Pt thin film during a hydrogen-plasma exposure,an oxygen-plasma etching process,and a subsequent aqua regia treatment.The structure of the diamond film is characterized of Raman spectroscopy and scanning electron microscope （SEM）,furthermore,Raman spectra suggest the existence of nano diamond characteristic peak （1 315 cm-1 ）.SEM show that the nano-needles evenly upright on the dia-mond film surface,and the density was close to 10^8/cm2 ,the average height of nano-needles approximate 1 μm.