摘要
基于紫外光刻工艺和微纳米结构转印技术制作出了一种MEMS仿生疏水表面,表面材料为聚二甲基硅氧烷(PDMS)。首先旋涂SU-8胶,利用紫外光刻技术制作出微型孔阵列模具,然后浇铸PDMS,固化后剥离,形成具有高粗糙度的PDMS薄膜,通过提高粗糙度改善PDMS表面的疏水性能。采用共聚焦显微镜和接触角仪表征其形貌和疏水性能,与原始的PDMS表面相比,该仿生功能表面的疏水性能得到显著改善,静态接触角增幅高达35.7%。此方法制作仿生疏水表面工艺简单、周期短、成本低且各参数易于控制。
A MEMS bionic hydrophobic surface was fabricated based on the ultraviolet light lithography process and micro/nano structure transfer patterning technique. The surface material is polydimethylsiloxane （PDMS）. Firstly, the SU- 8 photoresist was spun coating, and the micro hole array mold was fabricated with the ultraviolet light lithography process, then PDMS was poured on the SU - 8 photoresist. The PDMS was lift off after cured, then a PDMS film with high roughness was formed. And the hydrophobic property of PDMS was improved through enhancing the roughness. Its morphology and hydrophobic property were characterized with the confocal microscopy and contact angle machine. Compared with the original PDMS surface, the hydrophobic property of the bionic functional surface is significantly improved and the static contact angle increases as high as 35.7%. The fabrication method of the bionic hydrophobic surface has some advantages such as simple process, short cycle, low cost and easily controlled parameters.
出处
《微纳电子技术》
CAS
北大核心
2015年第5期329-333,共5页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(61401405
51475438)
山西省基础研究资助项目(2014011021-4)
关键词
疏水性
微纳米结构转印技术
光刻
聚二甲基硅氧烷(PDMS)
静态接触角
hydrophobicty
micro/nano structure transfer patterning technique
lithography
polydimethylsiloxane （PDMS）
static contact angle
