摘要
提出并研究了水环境下激光超声复合加工方法,利用该方法对氮化硅陶瓷进行刻蚀加工,加工时对试样施以高频振动。通过实验对比分析激光能量、脉冲宽度、重复频率和超声振动功率等工艺参数对Si3N4在超声振动辅助与无振动辅助情况下激光刻蚀后的深度及表面质量的影响。研究结果表明,在一定工艺参数范围内,超声振动的加入可明显增加激光超声复合刻蚀的深度,提高光洁度及表面质量。
A new method of laser-ultrasonic combined machining under water and is applied to etch Si3 N4 ceramics in this pa- per. The samples vibrate at a high frequency while being machined. A comparative study on the influence of process parameters used in laser machining with or without vibration on etching depth and surface quality of Si3 N4 ceramics is presented. The re- suits show that the introduction of ultrasonic vibration can increase the etching depth significantly and thus improve the surface quality within a certain range of parameters.
出处
《应用激光》
CSCD
北大核心
2015年第2期224-229,共6页
Applied Laser
基金
安徽省自然科学基金资助项目(项目编号:1208085ME79)
国家自然科学基金资助项目(项目编号:51175229)
关键词
激光超声复合加工
振动辅助
表面质量
刻蚀深度
laser-ultrasonic combined machining
vibration assistance
surface quality
etching depth
