激光高阶回馈微位移测量系统设计及误差分析

Design and error analysis of micro displacement measurement system based on laser high order feedback effect

设计了一套基于激光高阶回馈效应的微位移测量系统,介绍了其工作原理,给出了系统中光学单元、机械单元和信号处理及细分单元的设计方法及关键参数。对设计完成的测量系统与PI位移台进行了比对测试,实验结果表明系统的分辨率达到0.7 nm,并对测量系统进行了误差分析。激光高阶回馈微位移测量系统不但分辨率高,而且还具有结构简单和性价比高等优点,在精密位移测量中具有广泛的应用前景。

A micro displacement measurement system based on laser high order feedback effect is designed, and its principle is introduced. Also, the key parameters of optical system, mechanical part and single process units are given. Then, comparison tests are carried out for laser high order feedback system and PI moving stage. Test results show that the system resolution is up to 0. 7 nm, and the errors of measurement system are analyzed. Measurement sys- tem based on laser high order feedback effect has the advantages of high resolution, simple structure and high cost per- formance, which has broad application prospect in precision measurement field.