基于ZnO/SiC结构的Lamb波传感器研究

Research on Lamb wave sensor based on ZnO/SiC structure

由于超声波传感器的工作需要极高的灵敏度和稳定度,其性能优化一直是研究的重点之一。本文采用传递矩阵法计算了基于Zn O/Si C结构的Lamb波传感器的各项性能,包括机电耦合系数,插入损耗,灵敏度以及较小的最小检测域。根据模拟结果,对Lamb波传感器的以上性能参数进行了优化,得到了优化工作条件。研究发现,Lamb波多模特性为这种传感器的性能优化提供了丰富的选择性,选择不同的模式,可以对各项性能参数进行不同目的的优化。研究结果对研制高性能的Lamb波超声传感器具有理论指导作用。

The optimization of the ultrasonic sensor is the key to the research because high sensitivity and stability must be assured. In this paper, the transfer matrix method is used to calculate the performance of the Lamb wave sensor based on ZnO/SiC structure, in which the electromechanical coupling coefficients, sensitivities, insert losses and minimum detectable masses are simulated. According to the simulated results, proper working conditions are obtained for optimizing the abovementioned parameters. It is found that different modes of the Lamb wave can be used to optimize different performance parameters. The research results are useful to the design of high-performance Lamb wave sensors.