基于面阵CCD的迈克尔逊干涉环计数方法

Michelson interference fringe counting method based on array CCD

提出一种基于面阵CCD的迈克尔逊干涉环计数方法。该方法利用面阵CCD采集迈克尔逊干涉环图像,采用图像相减、图像滤波、灰度拉伸、边缘检测、二值化、图像膨胀和细化等方法对采集图像预处理,设计有效区域自动搜索算法确定有效区域中心,提出检测梯度方向角变化的方法对干涉环进行计数。实验结果表明,该方法设计的干涉环计数器精度高,稳定性强,满足了微距离测量的实际应用需求。

This paper designs a Michelson interference fringe counting method based on array CCD. The images of Michelson interference fringe are striped by CCD, and digital image processing including image subtraction, image filtering, gray-scale stretch, edge detection, binarization processing, image expansion and refinement are used to optimize the images. And then it designs an algorithm to automatically find valid center area. It also uses the gradient direction detection method to count the interference fringe. The experimental results show that this method of counting Michelson interference fringe has a high precision, strong stability, and meets the needs of practical applications.