飞秒激光诱导金属表面周期性结构分析

ANALYSIS OF FEMTOSECOND LASER INDUCED PERIODICAL STRUCTURES ON METAL

为揭示飞秒激光烧蚀金属的表面形貌特征及物理规律,实验上利用飞秒激光微加工系统对不同条件下金属铜和钛的烧蚀特性进行了理论和实验研究,应用扫描电子显微镜和X射线能量色散分析装置进行检测,以分析烧蚀区域的形貌特征及物质成分.基于激光脉冲能量时空上的高斯分布特征和能量累积效应,讨论了脉冲个数对周期性波纹结构产生的影响,理论和实验符合的很好.并对材料的去除机理进行分析,为实现材料的精细加工提供了重要的指导.

To reveal the surface morphology characteristics of femtosecond laser ablation of metal, we perform our experiment on copper and titanium under different conditions using femtosecond laser micro processing system. The scanning electron microscope （SEM） and Energy dispersive X- ray detector（EDX） are applied to analyze the morphology characteristics and material composition of the ablation area. We discussed the impact of the number of pulses on the femtosecond induced periodical structure both experimentally and theoretically. Experimental data agree well with theoretical results. Also, the material removal mechanism is analyzed, providing an important guidance on the processing of materials.