个人导航用压力传感器的三维打印制备数字模型

Digital model of pressure sensor used in PNS for 3DP manufacture

基于微喷三维打印机制造压力传感器,用于可穿戴的个人导航系统中。在基底表面不规则或者使用中经常被折弯的情况下,微喷打印工艺制备的MEMS器件精度更高,性能更好。研究了器件的可打印模型和工艺,给出压力传感器可打印的分层物理结构;研究了平面结构投影到三维基底上的投影空间,基于Terzopoulos弹性模型使用材料弹性度和结构弹性度模型给出投影空间;使用射线投影NURBS曲线来拟合边界轮廓,给出分层切片模型。为验证打印PZT膜的压电性能以及设计的压力传感器件的功能,使用不同的机械负荷测试其刚度,使用不同的直流偏置来测试耗损因数、品质因数等。通过比较实验对象的测量值和理论预测值之间的关系可以看出,打印的压力传感器薄膜具有很好的机械和电气性能。

The manufacture of MEMS pressure sensor in personal navigation system was studied based on a 3D micro-jet printer since MEMS devices with micro-jet priming have higher performance and precision on uneven and bending surface. The printable device model and technique were studied, and the printable layered physical structure was given. 2D-to-3D projection model and space are studied, and the material elastic degree and structure elastic degree models were given to get projection space based on Terzopoulos elastic model. NURBS curves were used to match the contour and get a layered slicing model. In the test, the stiffness was examined with different mechanical loads, and the dissipation factor and quality factor were obtained from different DC biases. The differences between theory prediction values and measurement values were in a reasonable range. The function of printable pressure sensor was achieved, and the electrical and mechanical performances were great. It is a useful model for device fabrication using electric paste based on 3D printing.