稀有气体卤化物准分子激光器工作气体实时补给技术(英文)

The Real-time Supply Technology of Working Gas in Rare-gas Halide Excimer Laser

为延长稀有气体卤化物准分子激光器工作气体使用寿命,在原有供气设备基础上增加了工作气体实时补给技术.该技术采用FPGA控制系统将逐步提高放电电压、补充卤素气体和更换部分混合气体等操作有效组合起来.随着激光脉冲能量的下降,逐步提高放电电压;当放电电压达到最大值时,开始补充卤素气体,并恢复放电电压;当补充卤素气体效果不明显时,更换部分混合工作气体.将该技术应用于医用型ArF准分子激光器中进行实验研究,结果表明:在没有使用工作气体实时补给技术的情况下,激光器累计工作14.38h后,输出单脉冲激光能量下降了17.2%;采用工作气体实时补给技术后,激光器输出能量下降速率明显降低,累计工作14.38h,其单脉冲能量下降率能控制在3%范围内.因此,采用该技术可延长激光器工作气体的使用寿命、提高输出激光能量稳定性、减少停机次数并降低运行成本.

In order to prolong the life of the working gas in rare-gas halide excimer lasers,the real-time supply technology was added.This technology used FPGA control system to combine some operations effectively,such as improving the discharge voltage gradually,adding halogen gas and replacing part of the mixed gas.With the decrease of pulse laser energy,the discharge voltage was improved gradually.When the discharge voltage reached maximizing,it was time to add halogen gas and restore the discharge voltage.When the effect adding halogen gas was not apparent,part of the mixed working gas should be replaced.The technology was applied in medical ArF excimer laser,the experimental results show that the laser output energy of the laser drops by 17.2%after working 14.38 haccumulated without the realtime supply technology of working gas.But with this technology,the laser output energy decline rate is significantly lower,and it is stabilized successfully within the range of 3% working the same hours.Therefore,using this technology can extend the life of the working gas laser,increase the laser output energy stability,reduce downtime and lower operating costs.