摘要
为提升傅里叶变换红外光谱仪的整体性能,基于立体角镜与平面镜组合的光学结构,设计了一种柔性支撑机构的摆动型动镜机构.建立和分析该机构控制模型,设计了相适应的反馈控制算法.结果表明:该结构具有无摩擦、抗震性好等优点;光学结构能够很好地补偿动镜摆动造成的倾斜与横移误差,保证仪器的重复性与稳定性;通过对控制算法参量的调整,动镜机构的扫描准确度优于98.4%.在4cm-1的光谱分辨率条件下,使用该动镜机构所测得的红外光谱信噪比优于80000:1,能够满足高准确度定量分析的要求.
Inorder to improve the performance of Fourier Transform Infrared Spectrometer,the optical structure was based on the combination of cube corner mirror and fixed plane mirror,a swing mechanism moving mirror scanning system was designed.The system transfer function was established and the characteristics of control model was analysised,a feedback algorithm was designed to fit the system.It indicates that the system was friction free and insensitive to vibration;the optical structure can compensate the tilt and shift caused by the swing of the moving mirror,ensure the repeatabilty and stability of instrument;the algorithm parameters was adjusted to improve scanning accuracy,and the precision is better than 98.4%.The SNR of spectral is better than 80000：1by using the system,under4cm^-1,which can meet the requirements of high precision quantitative analysis.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2015年第4期182-187,共6页
Acta Photonica Sinica
基金
国家重大科学仪器设备开发专项(No.2013YQ060615)资助
关键词
傅里叶变换红外光谱仪
动镜
柔性机构
PID
Fourier Transform Infrared Spectrometer
Moving mirror scanning system
Swing mechanism
PID
