9Liu J N, Singh B P, Furuhashi Hideo, et al. Fully Automatic Computer Controlled Mask Alignment Using Moire Technique[ A]. Proe of the 3rd Asian/Pacific International Symposium on Instrumentation, Measurement and Automatic Control[C], Beijing, China: 1996, 211 - 217.
10Liu J N, Furuhashi Hideo, Tofii Akihiro, et al. Precisi on angular alignment using moir- signals [ A ]. Proc of the 2nd China - Japan Symposium on Mechatronics[ C] , Chengdu, China: 1997, B9:203 - 208.