硅粉质量对合成法生产三氯氢硅的影响

Effects of the quality of silicon powder on trichlorosilane production

分析了硅粉质量对三氯氢硅合成的影响,包括:硅粉粒径对三氯氢硅收率和转化率的影响,硅粉含水量和杂质铝含量对系统运行稳定性的影响,以及杂质含量对合成三氯氢硅产品质量的影响。

The effects of the quality of silicon powder on trichlorosilane synthesis were analyzed, including the effect of silicon particle size on the yield of trichlorosilane and conversion rate, the effect of water and aluminum impurity content of the powder on the operation stability of the system, and the effect of impurity content on the quality of trichlorosilane product.