摘要
介绍了定义SPC控制限和规范限的一套方法。在多品种小批量的化合物半导体前道工艺线推行SPC的过程中,针对不同参数的性质不同,分别总结出了三种不同的定义方法,从而对前道工艺流程的全部参数实行了SPC监控,并在实际的控制中证明该方法是有效的。该方法解决了困扰SPC使用者如何定义控制限和规范限的难题,尤其对于刚开始推行SPC的生产线有借鉴意义。
A method of designing control limits and specification limits of SPC was described. Summarize three kinds of definition for SPC control limits and specification limits to different kinds of parameters when using SPC in Multi-varieties and small batch compound semiconductor Front-End Processes. Following this method to control all the parameters and that is proved availability in practice. This method help s the user of SPC defines control limits and specification limits of SPC, especially for new users.
出处
《电子工艺技术》
2015年第3期163-164,182,共3页
Electronics Process Technology
